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MKS Instruments, Inc. Data Sheets for Control Valves

Address:

90 Industrial Way
Wilmington, MA 01887-4610

Contact:

Web site
E-mail

Phone:	(978) 284-4000
Fax:	(978) 284-4999

Control Valves:

Control valves or proportional valves are power-operated devices used to modify fluid flow or pressure rate in a process system.

Learn more about Control Valves.

Product Name	Notes
Type 148	Valve is metal sealed design for high purity applications
Type 154	Valve is designed for flow rates from 20 to 200 slm
Type 248	Elastomer seal, general purpose valve for applications from 10 - 10000 sccm

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Company Description
MKS Instruments is a leading worldwide provider of instruments, components, subsystems and process control solutions that measure, control, power and monitor critical parameters of advanced manufacturing processes such as semiconductor device manufacturing; thin-film manufacturing for flat panel... (more)

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